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Silicon Devices and Process Integration [electronic resource] : Deep Submicron and Nano-Scale Technologies / by Badih El-Kareh.
El-Kareh, Badih.
(
author.
).
SpringerLink (Online service)
(
Added Author
).
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ISBN:
9780387690100
Physical Description:
online resource.
Publisher:
Boston, MA :
Springer US,
2009.
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Subject:
Engineering.
Computer engineering.
Electronics.
Systems engineering.
Materials.
Engineering.
Circuits and Systems.
Electronics and Microelectronics, Instrumentation.
Electrical Engineering.
Materials Science, general.
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