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MEMS/NEMS [electronic resource] : Handbook Techniques and Applications / edited by Cornelius T. Leondes.
Leondes, Cornelius T.
(
editor.
).
SpringerLink (Online service)
(
Added Author
).
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ISBN:
9780387257860
Physical Description:
XCII, 2096 p. 550 illus. online resource.
Publisher:
Boston, MA :
Springer US,
2006.
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Optical and Electronic Materials.
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