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Introductory MEMS Fabrication and Applications Cover Image E-book E-book

Introductory MEMS Fabrication and Applications

Adams, Thomas M. (author.). Layton, Richard A. (author.). SpringerLink (Online service) (Added Author).

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  • ISBN: 9780387095110
  • Physical Description: electronic
    electronic resource
    access
    remote
    XV, 444p. 50 illus., 25 illus. in color. online resource.
  • Edition: 1.
  • Publisher: Boston, MA : Springer US, 2010.

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