Catalog

Record Details

Catalog Search


Introductory MEMS Fabrication and Applications Cover Image E-book E-book

Introductory MEMS [electronic resource] : Fabrication and Applications / by Thomas M. Adams, Richard A. Layton.

Adams, Thomas M. (author.). Layton, Richard A. (author.). SpringerLink (Online service) (Added Author).

Record details

  • ISBN: 9780387095110
  • Physical Description: XV, 444p. 50 illus., 25 illus. in color. online resource.
  • Edition: 1.
  • Publisher: Boston, MA : Springer US, 2010.

Search for related items by subject

Subject: Engineering.
Mechanics.
Materials.
Electronics.
Systems engineering.
Surfaces (Physics).
Engineering.
Electronics and Microelectronics, Instrumentation.
Circuits and Systems.
Mechanics.
Surfaces and Interfaces, Thin Films.
Continuum Mechanics and Mechanics of Materials.

Electronic resources

Texto completo


Additional Resources