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Introductory MEMS Fabrication and Applications Cover Image E-book E-book

Introductory MEMS Fabrication and Applications

Adams, Thomas M. (author.). Layton, Richard A. (author.). SpringerLink (Online service) (Added Author).

Record details

  • ISBN: 9780387095110
  • Physical Description: electronic
    electronic resource
    access
    remote
    XV, 444p. 50 illus., 25 illus. in color. online resource.
  • Edition: 1.
  • Publisher: Boston, MA : Springer US, 2010.

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Subject: Engineering
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Circuits and Systems
Mechanics
Surfaces and Interfaces, Thin Films
Continuum Mechanics and Mechanics of Materials

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264 1. ‡aBoston, MA : ‡bSpringer US, ‡c2010.
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65024. ‡aElectronics and Microelectronics, Instrumentation.
65024. ‡aCircuits and Systems.
65024. ‡aMechanics.
65024. ‡aSurfaces and Interfaces, Thin Films.
65024. ‡aContinuum Mechanics and Mechanics of Materials.
7001 . ‡aLayton, Richard A. ‡eauthor.
7102 . ‡aSpringerLink (Online service)
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