E-book
Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.
Record details
- ISBN: 9783642129032
- Physical Description: XII, 444p. 352 illus., 33 illus. in color. digital.
- Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
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| Subject: | Engineering. Structural control (Engineering). Nanotechnology. Engineering. Nanotechnology and Microengineering. Mechatronics. Operating Procedures, Materials Treatment. Nanotechnology. |
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Electronic resources
| LDR | 01455nam a22003975i 4500 | ||
|---|---|---|---|
| 001 | 4601 | ||
| 003 | CONS | ||
| 005 | 20121026193315.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 110304s2011 gw | s |||| 0|eng d | ||
| 020 | . | ‡a9783642129032 ‡9978-3-642-12903-2 | |
| 024 | 7 | . | ‡a10.1007/978-3-642-12903-2 ‡2doi |
| 035 | . | ‡a(DE-He213)978-3-642-12903-2 | |
| 050 | 4. | ‡aT174.7 | |
| 072 | 7. | ‡aTDPB ‡2bicssc | |
| 072 | 7. | ‡aTEC027000 ‡2bisacsh | |
| 100 | 1 | . | ‡aBüttgenbach, Stephanus. |
| 245 | 1 | 0. | ‡aDesign and Manufacturing of Active Microsystems ‡h[electronic resource] / ‡cedited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. |
| 260 | . | ‡aBerlin, Heidelberg : ‡bSpringer Berlin Heidelberg, ‡c2011. | |
| 300 | . | ‡aXII, 444p. 352 illus., 33 illus. in color. ‡bdigital. | |
| 490 | 0 | . | ‡aMicrotechnology and MEMS, ‡x1615-8326 |
| 650 | 0. | ‡aEngineering. | |
| 650 | 0. | ‡aStructural control (Engineering). | |
| 650 | 0. | ‡aNanotechnology. | |
| 650 | 1 | 4. | ‡aEngineering. |
| 650 | 2 | 4. | ‡aNanotechnology and Microengineering. |
| 650 | 2 | 4. | ‡aMechatronics. |
| 650 | 2 | 4. | ‡aOperating Procedures, Materials Treatment. |
| 650 | 2 | 4. | ‡aNanotechnology. |
| 700 | 1 | . | ‡aBurisch, Arne. |
| 700 | 1 | . | ‡aHesselbach, Jürgen. |
| 710 | 2 | . | ‡aSpringerLink (Online service) |
| 773 | 0 | . | ‡tSpringer eBooks |
| 776 | 0 | 8. | ‡iPrinted edition: ‡z9783642129025 |
| 830 | 0. | ‡aMicrotechnology and MEMS, ‡x1615-8326 | |
| 856 | 4 | 0. | ‡uhttp://dx.doi.org/10.1007/978-3-642-12903-2 ‡9CONS |
| 950 | . | ‡aChemistry and Materials Science (Springer-11644) | |
| 901 | . | ‡a4601 ‡b ‡c4601 ‡tbiblio ‡sSystem Local | |
