E-book
Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.
Record details
- ISBN: 9783642129032
- Physical Description: XII, 444p. 352 illus., 33 illus. in color. digital.
- Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
Search for related items by subject
| Subject: | Engineering. Structural control (Engineering). Nanotechnology. Engineering. Nanotechnology and Microengineering. Mechatronics. Operating Procedures, Materials Treatment. Nanotechnology. |
