E-book
Design and Manufacturing of Active Microsystems
Record details
- ISBN: 9783642129032
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Physical Description:
electronic
electronic resource
access
remote
XII, 444p. 352 illus., 33 illus. in color. digital. - Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
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| Subject: | Engineering Structural control (Engineering) Nanotechnology Engineering Nanotechnology and Microengineering Mechatronics Operating Procedures, Materials Treatment Nanotechnology |
