Laser Precision Microfabrication [electronic resource] / edited by Koji Sugioka, Michel Meunier, Alberto Piqué.
Record details
- ISBN: 9783642105234
- Physical Description: XVI, 344 p. online resource.
- Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2010.
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Subject: | Physics. Nanotechnology. Physics. Laser Technology, Photonics. Nanotechnology. |