MEMS Reliability [electronic resource] / by Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea.
Record details
- ISBN: 9781441960184
- Physical Description: XIV, 294 p. digital.
- Edition: 1.
- Publisher: Boston, MA : Springer US, 2011.
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Subject: | Engineering. Electronics. Engineering. Electronics and Microelectronics, Instrumentation. |