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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration Cover Image E-book E-book

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Laconte, J. (author.). Flandre, D. (author.). Raskin, J. -P. (author.). SpringerLink (Online service) (Added Author).

Record details

  • ISBN: 9780387288437
  • Physical Description: electronic
    electronic resource
    access
    remote
    XIII, 292 p. online resource.
  • Publisher: Boston, MA : Springer US, 2006.
Subject: Engineering
Particles (Nuclear physics)
Physical optics
Electronics
Systems engineering
Surfaces (Physics)
Engineering
Physics and Applied Physics in Engineering
Electronics and Microelectronics, Instrumentation
Circuits and Systems
Solid State Physics and Spectroscopy
Applied Optics, Optoelectronics, Optical Devices
Surfaces and Interfaces, Thin Films

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