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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration [electronic resource] / by J. Laconte, D. Flandre, J. -P. Raskin.
Laconte, J.
(
author.
).
Flandre, D.
(
author.
).
Raskin, J. -P.
(
author.
).
SpringerLink (Online service)
(
Added Author
).
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Record details
ISBN:
9780387288437
Physical Description:
XIII, 292 p. online resource.
Publisher:
Boston, MA :
Springer US,
2006.
Search for related items by subject
Subject:
Engineering.
Particles (Nuclear physics).
Physical optics.
Electronics.
Systems engineering.
Surfaces (Physics).
Engineering.
Physics and Applied Physics in Engineering.
Electronics and Microelectronics, Instrumentation.
Circuits and Systems.
Solid State Physics and Spectroscopy.
Applied Optics, Optoelectronics, Optical Devices.
Surfaces and Interfaces, Thin Films.
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