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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration Cover Image E-book E-book

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Laconte, J. (author.). Flandre, D. (author.). Raskin, J. -P. (author.). SpringerLink (Online service) (Added Author).

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  • ISBN: 9780387288437
  • Physical Description: electronic
    electronic resource
    access
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    XIII, 292 p. online resource.
  • Publisher: Boston, MA : Springer US, 2006.

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