Design and Manufacturing of Active Microsystems [electronic resource] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.

Büttgenbach, Stephanus. (Author). Burisch, Arne. (Added Author). Hesselbach, Jürgen. (Added Author). SpringerLink (Online service) (Added Author).

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• ISBN: 9783642129032
• Physical Description: XII, 444p. 352 illus., 33 illus. in color. digital.
• Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.

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