Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties
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- ISBN: 9783642144479
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Physical Description:
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electronic resource
access
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XVIII, 174 p. online resource. - Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2010.
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Subject: | Optical materials Materials Science Optical and Electronic Materials |