Rare-Earth Implanted MOS Devices for Silicon Photonics [electronic resource] : Microstructural, Electrical and Optoelectronic Properties / by Lars Rebohle, Wolfgang Skorupa.

Rebohle, Lars. (author.). Skorupa, Wolfgang. (author.). SpringerLink (Online service) (Added Author).

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• ISBN: 9783642144479
• Physical Description: XVIII, 174 p. online resource.
• Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2010.

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