Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties
Record details
- ISBN: 9783642144479
- Physical Description: XVIII, 174 p. online resource.
- Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2010.
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Subject: | Optical materials. Materials Science. Optical and Electronic Materials. |