Reactive Sputter Deposition [electronic resource] / edited by Diederik Depla, Stijn Mahieu.

Depla, Diederik. (editor.). Mahieu, Stijn. (editor.). SpringerLink (Online service) (Added Author).

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• ISBN: 9783540766643
• Physical Description: online resource.
• Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2008.

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