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  • ISBN: 9783540766643
  • Physical Description: electronic
    electronic resource
    access
    remote
    online resource.
  • Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2008.
Subject: Chemistry
Chemistry, Physical organic
Chemical engineering
Surfaces (Physics)
Chemistry
Surfaces and Interfaces, Thin Films
Condensed Matter Physics
Physical Chemistry
Industrial Chemistry/Chemical Engineering
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020 . ‡a9783540766643 ‡9978-3-540-76664-3
0247 . ‡a10.1007/978-3-540-76664-3 ‡2doi
035 . ‡a(DE-He213)978-3-540-76664-3
050 4. ‡aTA418.7-418.76
050 4. ‡aTA418.9.T45
072 7. ‡aTGM ‡2bicssc
072 7. ‡aPNRX ‡2bicssc
072 7. ‡aTEC021000 ‡2bisacsh
1001 . ‡aDepla, Diederik. ‡eeditor.
24510. ‡aReactive Sputter Deposition ‡h[electronic resource] / ‡cedited by Diederik Depla, Stijn Mahieu.
264 1. ‡aBerlin, Heidelberg : ‡bSpringer Berlin Heidelberg, ‡c2008.
300 . ‡bonline resource.
336 . ‡atext ‡btxt ‡2rdacontent
337 . ‡acomputer ‡bc ‡2rdamedia
338 . ‡aonline resource ‡bcr ‡2rdacarrier
347 . ‡atext file ‡bPDF ‡2rda
4901 . ‡aSpringer Series in Materials Science, ‡x0933-033X ; ‡v109
650 0. ‡aChemistry.
650 0. ‡aChemistry, Physical organic.
650 0. ‡aChemical engineering.
650 0. ‡aSurfaces (Physics).
65014. ‡aChemistry.
65024. ‡aSurfaces and Interfaces, Thin Films.
65024. ‡aCondensed Matter Physics.
65024. ‡aPhysical Chemistry.
65024. ‡aIndustrial Chemistry/Chemical Engineering.
7001 . ‡aMahieu, Stijn. ‡eeditor.
7102 . ‡aSpringerLink (Online service)
7730 . ‡tSpringer eBooks
77608. ‡iPrinted edition: ‡z9783540766629
830 0. ‡aSpringer Series in Materials Science, ‡x0933-033X ; ‡v109
85640. ‡uhttp://biblioteca.ipicyt.edu.mx:2048/login?url=http://dx.doi.org/10.1007/978-3-540-76664-3 ‡yTexto completo ‡9CONS
950 . ‡aChemistry and Materials Science (Springer-11644)
901 . ‡a35218 ‡b ‡c35218 ‡tbiblio ‡sSystem Local
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