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E-book
MEMS Materials and Processes Handbook
Ghodssi, Reza.
(
Author
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Lin, Pinyen.
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).
SpringerLink (Online service)
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ISBN:
9780387473185
Physical Description:
XXXVI, 1188p. 200 illus.. In 2 volumes, not available separately. digital.
Publisher:
Boston, MA :
Springer US,
2011.
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Subject:
Engineering.
Electronics.
Systems engineering.
Materials.
Surfaces (Physics).
Engineering.
Electronics and Microelectronics, Instrumentation.
Materials Science, general.
Circuits and Systems.
Surfaces and Interfaces, Thin Films.
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MEMS Reference Shelf,
1936-4407
MEMS Reference Shelf,
1936-4407
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