MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin.
![E-book E-book](http://biblioteca.ipicyt.edu.mx/images/format_icons/icon_format/ebook.png?cafb27)
Electronic resources
Record details
- ISBN: 9780387473185
- Physical Description: XXXVI, 1188p. 200 illus.. In 2 volumes, not available separately. digital.
- Publisher: Boston, MA : Springer US, 2011.