Catalog

Record Details

Catalog Search


Poly-SiGe for MEMS-above-CMOS Sensors Cover Image E-book E-book

Poly-SiGe for MEMS-above-CMOS Sensors [electronic resource] / by Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw.

Gonzalez Ruiz, Pilar. (author.). De Meyer, Kristin. (author.). Witvrouw, Ann. (author.). SpringerLink (Online service) (Added Author).

Record details

  • ISBN: 9789400767997
  • Physical Description: XVI, 199 p. 144 illus. online resource.
  • Publisher: Dordrecht : Springer Netherlands : 2014.

Search for related items by subject

Subject: Physics.
Engineering.
Systems engineering.
Optical materials.
Surfaces (Physics).
Physics.
Electronic Circuits and Devices.
Circuits and Systems.
Optical and Electronic Materials.
Nanotechnology and Microengineering.
Characterization and Evaluation of Materials.

Search for related items by series

Electronic resources

Texto completo


Additional Resources