Poly-SiGe for MEMS-above-CMOS Sensors

Gonzalez Ruiz, Pilar. (author.). De Meyer, Kristin. (author.). Witvrouw, Ann. (author.). SpringerLink (Online service) (Added Author).

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• ISBN: 9789400767997
• Physical Description: electronic
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  XVI, 199 p. 144 illus. online resource.
• Publisher: Dordrecht : Springer Netherlands : 2014.

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• Springer Series in Advanced Microelectronics, 44