Atomic Layer Deposition for Semiconductors [electronic resource] / edited by Choel Seong Hwang.

Hwang, Choel Seong. (editor.). SpringerLink (Online service) (Added Author).

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• ISBN: 9781461480549
• Physical Description: X, 263 p. 170 illus., 81 illus. in color. online resource.
• Publisher: Boston, MA : Springer US : 2014.

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