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Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing Cover Image E-book E-book

Precision Nanometrology [electronic resource] : Sensors and Measuring Systems for Nanomanufacturing / by Wei Gao.

Gao, Wei. (author.). SpringerLink (Online service) (Added Author).

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  • ISBN: 9781849962544
  • Physical Description: XIII, 354 p. online resource.
  • Publisher: London : Springer London, 2010.

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Subject: Engineering.
Control engineering systems.
Machinery.
Nanotechnology.
Engineering.
Manufacturing, Machines, Tools.
Measurement Science and Instrumentation.
Nanotechnology.
Control , Robotics, Mechatronics.

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