Shape and Functional Elements of the Bulk Silicon Microtechnique [electronic resource] : A Manual of Wet-Etched Silicon Structures / by Joachim Frühauf.

Frühauf, Joachim. (author.). SpringerLink (Online service) (Added Author).

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• ISBN: 9783540268765
• Physical Description: XII, 221 p. 165 illus. online resource.
• Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.

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