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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration Cover Image E-book E-book

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Laconte, J. (author.). Flandre, D. (author.). Raskin, J. -P. (author.). SpringerLink (Online service) (Added Author).

Record details

  • ISBN: 9780387288437
  • Physical Description: electronic
    electronic resource
    access
    remote
    XIII, 292 p. online resource.
  • Publisher: Boston, MA : Springer US, 2006.

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Subject: Engineering
Particles (Nuclear physics)
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Physics and Applied Physics in Engineering
Electronics and Microelectronics, Instrumentation
Circuits and Systems
Solid State Physics and Spectroscopy
Applied Optics, Optoelectronics, Optical Devices
Surfaces and Interfaces, Thin Films

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65024. ‡aSurfaces and Interfaces, Thin Films.
7001 . ‡aFlandre, D. ‡eauthor.
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