Micro and Nanomanufacturing [electronic resource] / by Mark J. Jackson.
Record details
- ISBN: 9780387261324
- Physical Description: X, 699 p. online resource.
- Publisher: Boston, MA : Springer US, 2007.
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Subject: | Engineering. Mechanical engineering. Machinery. Electronics. Engineering. Mechanical Engineering. Electronics and Microelectronics, Instrumentation. Manufacturing, Machines, Tools. |