Handbook of sputter deposition technology : principles, technology and applications / Kiyotaka Wasa, Shigeru Hayakawa.
Record details
- ISBN: 0815512805
- Physical Description: xii, 304 p. : il. ; 25 cm.
- Publisher: Westwoog, N. J. : Noyes Publications, c1992.
Content descriptions
| Bibliography, etc. Note: | Incluye bibliografía e índice. |
| Language Note: | English |
Search for related items by subject
| Subject: | Películas delgadas. Pulverización catódica (Metalización). |
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Available copies
- 1 of 1 copy available at IPICYT.
Holds
- 0 current holds with 1 total copy.
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| Location | Call Number / Copy Notes | Barcode | Shelving Location | Status | Due Date |
|---|---|---|---|---|---|
| Biblioteca Ipicyt | TS695W3 H3 1992 | AVA00250 | Coleccion General | Available | - |
| LDR | 00805cam a20002054a00 | ||
|---|---|---|---|
| 001 | 625 | ||
| 003 | CONS | ||
| 005 | 20170504174716.0 | ||
| 007 | ta | ||
| 008 | 031028su 1992nyua fr #001 0#eng u | ||
| 020 | . | ‡a0815512805 | |
| 050 | 0 | 0. | ‡aTS695 W3 H3 1992 |
| 100 | 1 | . | ‡aWasa, Kiyotaka. |
| 245 | 1 | 0. | ‡aHandbook of sputter deposition technology : ‡bprinciples, technology and applications / ‡cKiyotaka Wasa, Shigeru Hayakawa. |
| 260 | . | ‡aWestwoog, N. J. : ‡bNoyes Publications, ‡cc1992. | |
| 300 | . | ‡axii, 304 p. : ‡bil. ; ‡c25 cm. | |
| 440 | 0. | ‡aMaterials science and process technology series | |
| 504 | . | ‡aIncluye bibliografía e índice. | |
| 546 | . | ‡aEnglish | |
| 650 | 0. | ‡aPelículas delgadas. | |
| 650 | 0. | ‡aPulverización catódica (Metalización). | |
| 700 | 1 | . | ‡aHayakawa, Shigeru, ‡d1925- |
| 999 | . | ‡aTS695 W3 H3 1992 ‡iAVA00250 ‡lCOL_GRAL ‡tLIBRO | |
| 901 | . | ‡a625 ‡b ‡c625 ‡tbiblio ‡sSystem Local | |
