Handbook of sputter deposition technology : principles, technology and applications / Kiyotaka Wasa, Shigeru Hayakawa.
Record details
- ISBN: 0815512805
- Physical Description: xii, 304 p. : il. ; 25 cm.
- Publisher: Westwoog, N. J. : Noyes Publications, c1992.
Content descriptions
Bibliography, etc. Note: | Incluye bibliografía e índice. |
Language Note: | English |
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Subject: | Películas delgadas. Pulverización catódica (Metalización). |
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Available copies
- 1 of 1 copy available at IPICYT.
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- 0 current holds with 1 total copy.
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Location | Call Number / Copy Notes | Barcode | Shelving Location | Status | Due Date |
---|---|---|---|---|---|
Biblioteca Ipicyt | TS695W3 H3 1992 | AVA00250 | Coleccion General | Available | - |