Introduction to Microsystem Design [electronic resource] / by Werner Karl Schomburg.
Record details
- ISBN: 9783642194894
- Physical Description: XXII, 321p. 225 illus. digital.
- Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
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| Subject: | Engineering. Systems engineering. Optical materials. Engineering. Nanotechnology and Microengineering. Optical and Electronic Materials. Applied and Technical Physics. Circuits and Systems. |
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Electronic resources
| LDR | 01279nam a22003735i 4500 | ||
|---|---|---|---|
| 001 | 5158 | ||
| 003 | CONS | ||
| 005 | 20121026161018.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 110530s2011 gw | s |||| 0|eng d | ||
| 020 | . | ‡a9783642194894 ‡9978-3-642-19489-4 | |
| 024 | 7 | . | ‡a10.1007/978-3-642-19489-4 ‡2doi |
| 035 | . | ‡a(DE-He213)978-3-642-19489-4 | |
| 050 | 4. | ‡aT174.7 | |
| 072 | 7. | ‡aTDPB ‡2bicssc | |
| 072 | 7. | ‡aTEC027000 ‡2bisacsh | |
| 100 | 1 | . | ‡aSchomburg, Werner Karl. |
| 245 | 1 | 0. | ‡aIntroduction to Microsystem Design ‡h[electronic resource] / ‡cby Werner Karl Schomburg. |
| 260 | . | ‡aBerlin, Heidelberg : ‡bSpringer Berlin Heidelberg, ‡c2011. | |
| 300 | . | ‡aXXII, 321p. 225 illus. ‡bdigital. | |
| 490 | 0 | . | ‡aRWTHedition, ‡x1865-0899 ; ‡v1 |
| 650 | 0. | ‡aEngineering. | |
| 650 | 0. | ‡aSystems engineering. | |
| 650 | 0. | ‡aOptical materials. | |
| 650 | 1 | 4. | ‡aEngineering. |
| 650 | 2 | 4. | ‡aNanotechnology and Microengineering. |
| 650 | 2 | 4. | ‡aOptical and Electronic Materials. |
| 650 | 2 | 4. | ‡aApplied and Technical Physics. |
| 650 | 2 | 4. | ‡aCircuits and Systems. |
| 710 | 2 | . | ‡aSpringerLink (Online service) |
| 773 | 0 | . | ‡tSpringer eBooks |
| 776 | 0 | 8. | ‡iPrinted edition: ‡z9783642194887 |
| 830 | 0. | ‡aRWTHedition, ‡x1865-0899 ; ‡v1 | |
| 856 | 4 | 0. | ‡uhttp://dx.doi.org/10.1007/978-3-642-19489-4 ‡9CONS |
| 950 | . | ‡aEngineering (Springer-11647) | |
| 901 | . | ‡a5158 ‡b ‡c5158 ‡tbiblio ‡sSystem Local | |