E-book
Multilayer Integrated Film Bulk Acoustic Resonators
Record details
- ISBN: 9783642317767
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Physical Description:
electronic
electronic resource
access
remote
X, 152 p. 97 illus. online resource. - Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
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| Subject: | Engineering Surfaces (Physics) Engineering Nanotechnology and Microengineering Surfaces and Interfaces, Thin Films Solid State Physics |
