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| 01718nam a22004695i 4500 |
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| 001 | 35218 |
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| 003 | CONS |
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| 005 | 20131219133701.0 |
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| 007 | cr nn 008mamaa |
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| 008 | 100301s2008 gw | s |||| 0|eng d |
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| 020 | | . |
‡a9783540766643
‡9978-3-540-76664-3 |
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| 024 | 7 | . |
‡a10.1007/978-3-540-76664-3
‡2doi |
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| 035 | | . |
‡a(DE-He213)978-3-540-76664-3 |
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| 050 | | 4. |
‡aTA418.7-418.76 |
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| 050 | | 4. |
‡aTA418.9.T45 |
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| 072 | | 7. |
‡aTGM
‡2bicssc |
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| 072 | | 7. |
‡aPNRX
‡2bicssc |
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| 072 | | 7. |
‡aTEC021000
‡2bisacsh |
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| 100 | 1 | . |
‡aDepla, Diederik.
‡eeditor. |
|---|
| 245 | 1 | 0. |
‡aReactive Sputter Deposition
‡h[electronic resource] /
‡cedited by Diederik Depla, Stijn Mahieu. |
|---|
| 264 | | 1. |
‡aBerlin, Heidelberg :
‡bSpringer Berlin Heidelberg,
‡c2008. |
|---|
| 300 | | . |
‡bonline resource. |
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| 336 | | . |
‡atext
‡btxt
‡2rdacontent |
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| 337 | | . |
‡acomputer
‡bc
‡2rdamedia |
|---|
| 338 | | . |
‡aonline resource
‡bcr
‡2rdacarrier |
|---|
| 347 | | . |
‡atext file
‡bPDF
‡2rda |
|---|
| 490 | 1 | . |
‡aSpringer Series in Materials Science,
‡x0933-033X ;
‡v109 |
|---|
| 650 | | 0. |
‡aChemistry. |
|---|
| 650 | | 0. |
‡aChemistry, Physical organic. |
|---|
| 650 | | 0. |
‡aChemical engineering. |
|---|
| 650 | | 0. |
‡aSurfaces (Physics). |
|---|
| 650 | 1 | 4. |
‡aChemistry. |
|---|
| 650 | 2 | 4. |
‡aSurfaces and Interfaces, Thin Films. |
|---|
| 650 | 2 | 4. |
‡aCondensed Matter Physics. |
|---|
| 650 | 2 | 4. |
‡aPhysical Chemistry. |
|---|
| 650 | 2 | 4. |
‡aIndustrial Chemistry/Chemical Engineering. |
|---|
| 700 | 1 | . |
‡aMahieu, Stijn.
‡eeditor. |
|---|
| 710 | 2 | . |
‡aSpringerLink (Online service) |
|---|
| 773 | 0 | . |
‡tSpringer eBooks |
|---|
| 776 | 0 | 8. |
‡iPrinted edition:
‡z9783540766629 |
|---|
| 830 | | 0. |
‡aSpringer Series in Materials Science,
‡x0933-033X ;
‡v109 |
|---|
| 856 | 4 | 0. |
‡uhttp://biblioteca.ipicyt.edu.mx:2048/login?url=http://dx.doi.org/10.1007/978-3-540-76664-3
‡yTexto completo
‡9CONS |
|---|
| 950 | | . |
‡aChemistry and Materials Science (Springer-11644) |
|---|
| 901 | | . |
‡a35218
‡b
‡c35218
‡tbiblio
‡sSystem Local |
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