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Reactive Sputter Deposition Cover Image E-book E-book

Reactive Sputter Deposition

Depla, Diederik. (editor.). Mahieu, Stijn. (editor.). SpringerLink (Online service) (Added Author).

Record details

  • ISBN: 9783540766643
  • Physical Description: electronic
    electronic resource
    access
    remote
    online resource.
  • Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2008.
Subject: Chemistry
Chemistry, Physical organic
Chemical engineering
Surfaces (Physics)
Chemistry
Surfaces and Interfaces, Thin Films
Condensed Matter Physics
Physical Chemistry
Industrial Chemistry/Chemical Engineering

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