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MEMS Materials and Processes Handbook Cover Image E-book E-book

MEMS Materials and Processes Handbook

Ghodssi, Reza. (Author). Lin, Pinyen. (Added Author). SpringerLink (Online service) (Added Author).

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  • ISBN: 9780387473185
  • Physical Description: electronic
    electronic resource
    access
    remote
    XXXVI, 1188p. 200 illus.. In 2 volumes, not available separately. digital.
  • Publisher: Boston, MA : Springer US, 2011.

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Subject: Engineering
Electronics
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Materials
Surfaces (Physics)
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Circuits and Systems
Surfaces and Interfaces, Thin Films

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