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| 01666nam a22004455i 4500 |
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| 001 | 3068 |
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| 003 | CONS |
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| 005 | 20121026210644.0 |
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| 007 | cr nn 008mamaa |
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| 008 | 110317s2011 xxu| s |||| 0|eng d |
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| 020 | | . |
‡a9780387473185
‡9978-0-387-47318-5 |
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| 024 | 7 | . |
‡a10.1007/978-0-387-47318-5
‡2doi |
|---|
| 035 | | . |
‡a(DE-He213)978-0-387-47318-5 |
|---|
| 050 | | 4. |
‡aTK7800-8360 |
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| 050 | | 4. |
‡aTK7874-7874.9 |
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| 072 | | 7. |
‡aTJF
‡2bicssc |
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| 072 | | 7. |
‡aTEC008000
‡2bisacsh |
|---|
| 072 | | 7. |
‡aTEC008070
‡2bisacsh |
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| 100 | 1 | . |
‡aGhodssi, Reza. |
|---|
| 245 | 1 | 0. |
‡aMEMS Materials and Processes Handbook
‡h[electronic resource] /
‡cedited by Reza Ghodssi, Pinyen Lin. |
|---|
| 246 | 3 | . |
‡aThe Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied |
|---|
| 260 | | . |
‡aBoston, MA :
‡bSpringer US,
‡c2011. |
|---|
| 300 | | . |
‡aXXXVI, 1188p. 200 illus.. In 2 volumes, not available separately.
‡bdigital. |
|---|
| 490 | 0 | . |
‡aMEMS Reference Shelf,
‡x1936-4407 |
|---|
| 650 | | 0. |
‡aEngineering. |
|---|
| 650 | | 0. |
‡aElectronics. |
|---|
| 650 | | 0. |
‡aSystems engineering. |
|---|
| 650 | | 0. |
‡aMaterials. |
|---|
| 650 | | 0. |
‡aSurfaces (Physics). |
|---|
| 650 | 1 | 4. |
‡aEngineering. |
|---|
| 650 | 2 | 4. |
‡aElectronics and Microelectronics, Instrumentation. |
|---|
| 650 | 2 | 4. |
‡aMaterials Science, general. |
|---|
| 650 | 2 | 4. |
‡aCircuits and Systems. |
|---|
| 650 | 2 | 4. |
‡aSurfaces and Interfaces, Thin Films. |
|---|
| 700 | 1 | . |
‡aLin, Pinyen. |
|---|
| 710 | 2 | . |
‡aSpringerLink (Online service) |
|---|
| 773 | 0 | . |
‡tSpringer eBooks |
|---|
| 776 | 0 | 8. |
‡iPrinted edition:
‡z9780387473161 |
|---|
| 830 | | 0. |
‡aMEMS Reference Shelf,
‡x1936-4407 |
|---|
| 856 | 4 | 0. |
‡uhttp://dx.doi.org/10.1007/978-0-387-47318-5
‡9CONS |
|---|
| 950 | | . |
‡aEngineering (Springer-11647) |
|---|
| 901 | | . |
‡a3068
‡b
‡c3068
‡tbiblio
‡sSystem Local |
|---|
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