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| 003 | CONS | 
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| 008 | 100301s2010    ne |    s    |||| 0|eng d | 
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| 020 |  | . | ‡a9789048125203 
			‡9978-90-481-2520-3 | 
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| 024 | 7 | . | ‡a10.1007/978-90-481-2520-3 
			‡2doi | 
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| 035 |  | . | ‡a(DE-He213)978-90-481-2520-3 | 
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| 072 |  | 7. | ‡aTEC016000 
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| 100 | 1 | . | ‡aDeulin, E. A. 
			‡eauthor. | 
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| 245 | 1 | 0. | ‡aMechanics and Physics of Precise Vacuum Mechanisms 
			‡h[electronic resource] / 
			‡cby E. A. Deulin, V. P. Mikhailov, Yu V. Panfilov, R. A. Nevshupa. | 
|---|
| 264 |  | 1. | ‡aDordrecht : 
			‡bSpringer Netherlands, 
			‡c2010. | 
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| 300 |  | . | ‡bonline resource. | 
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| 336 |  | . | ‡atext 
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| 337 |  | . | ‡acomputer 
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| 347 |  | . | ‡atext file 
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| 490 | 1 | . | ‡aFluid Mechanics and Its Applications, 
			‡x0926-5112 ; 
			‡v91 | 
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| 650 |  | 0. | ‡aEngineering. | 
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| 650 |  | 0. | ‡aVibration. | 
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| 650 |  | 0. | ‡aEngineering design. | 
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| 650 |  | 0. | ‡aChemistry, inorganic. | 
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| 650 |  | 0. | ‡aSurfaces (Physics). | 
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| 650 | 1 | 4. | ‡aEngineering. | 
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| 650 | 2 | 4. | ‡aEngineering Design. | 
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| 650 | 2 | 4. | ‡aEngineering, general. | 
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| 650 | 2 | 4. | ‡aTribology, Corrosion and Coatings. | 
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| 650 | 2 | 4. | ‡aSurfaces and Interfaces, Thin Films. | 
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| 650 | 2 | 4. | ‡aVibration, Dynamical Systems, Control. | 
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| 700 | 1 | . | ‡aMikhailov, V. P. 
			‡eauthor. | 
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| 700 | 1 | . | ‡aPanfilov, Yu V. 
			‡eauthor. | 
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| 700 | 1 | . | ‡aNevshupa, R. A. 
			‡eauthor. | 
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| 710 | 2 | . | ‡aSpringerLink (Online service) | 
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| 773 | 0 | . | ‡tSpringer eBooks | 
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| 776 | 0 | 8. | ‡iPrinted edition: 
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| 830 |  | 0. | ‡aFluid Mechanics and Its Applications, 
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