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Poly-SiGe for MEMS-above-CMOS Sensors Cover Image E-book E-book

Poly-SiGe for MEMS-above-CMOS Sensors

Gonzalez Ruiz, Pilar. (author.). De Meyer, Kristin. (author.). Witvrouw, Ann. (author.). SpringerLink (Online service) (Added Author).

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  • ISBN: 9789400767997
  • Physical Description: electronic
    electronic resource
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    XVI, 199 p. 144 illus. online resource.
  • Publisher: Dordrecht : Springer Netherlands : Imprint: Springer, 2014.

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Subject: Physics
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Surfaces (Physics)
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Nanotechnology and Microengineering
Characterization and Evaluation of Materials

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