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Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing Cover Image E-book E-book

Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing

Gao, Wei. (author.). SpringerLink (Online service) (Added Author).

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  • ISBN: 9781849962544
  • Physical Description: electronic
    electronic resource
    access
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    XIII, 354 p. online resource.
  • Publisher: London : Springer London, 2010.

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Subject: Engineering
Control engineering systems
Machinery
Nanotechnology
Engineering
Manufacturing, Machines, Tools
Measurement Science and Instrumentation
Nanotechnology
Control , Robotics, Mechatronics

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