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Post-processing techniques for integrated MEMS / Sherif Sedky.

Sedky, Sherif. (Author).

Record details

  • ISBN: 1580539017
  • Physical Description: xiv, 207 p. : il. ; 24 cm.
  • Publisher: Norwood, Massachusetts : Artch House, c2006.

Content descriptions

Bibliography, etc. Note:
Incluye bibliografía e índice.
Subject: Sistemas microelectromecánicos.

Available copies

  • 1 of 1 copy available at IPICYT.

Holds

  • 0 current holds with 1 total copy.
Show Only Available Copies
Location Call Number / Copy Notes Barcode Shelving Location Status Due Date
Biblioteca Ipicyt TK7875S4 P6 2006 APL00753 Coleccion General Available -

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006 aaaafr 1
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020 . ‡a1580539017
05000. ‡aTK7875 ‡bS4 P6 2006
1001 . ‡aSedky, Sherif.
24510. ‡aPost-processing techniques for integrated MEMS / ‡cSherif Sedky.
260 . ‡aNorwood, Massachusetts : ‡bArtch House, ‡cc2006.
300 . ‡axiv, 207 p. : ‡bil. ; ‡c24 cm.
440 0. ‡aMicroelectromechanical systems series
504 . ‡aIncluye bibliografía e índice.
650 0. ‡aSistemas microelectromecánicos.
999 . ‡aTK7875 S4 P6 2006 ‡iAPL00753 ‡lCOL_GRAL ‡tLIBRO
901 . ‡a201 ‡b ‡c201 ‡tbiblio ‡sSystem Local

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