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| 01567nam a22003975i 4500 |
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| 001 | 19230 |
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| 003 | CONS |
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| 005 | 20131219202307.0 |
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| 007 | cr nn 008mamaa |
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| 008 | 100301s2005 gw | s |||| 0|eng d |
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| 020 | | . |
‡a9783540268765
‡9978-3-540-26876-5 |
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| 024 | 7 | . |
‡a10.1007/b138230
‡2doi |
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| 035 | | . |
‡a(DE-He213)978-3-540-26876-5 |
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| 100 | 1 | . |
‡aFrühauf, Joachim.
‡eauthor. |
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| 245 | 1 | 0. |
‡aShape and Functional Elements of the Bulk Silicon Microtechnique
‡h[electronic resource] :
‡bA Manual of Wet-Etched Silicon Structures /
‡cby Joachim Frühauf. |
|---|
| 264 | | 1. |
‡aBerlin, Heidelberg :
‡bSpringer Berlin Heidelberg,
‡c2005. |
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| 300 | | . |
‡aXII, 221 p. 165 illus.
‡bonline resource. |
|---|
| 336 | | . |
‡atext
‡btxt
‡2rdacontent |
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| 337 | | . |
‡acomputer
‡bc
‡2rdamedia |
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| 338 | | . |
‡aonline resource
‡bcr
‡2rdacarrier |
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| 347 | | . |
‡atext file
‡bPDF
‡2rda |
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| 650 | | 0. |
‡aChemistry. |
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| 650 | | 0. |
‡aChemical engineering. |
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| 650 | | 0. |
‡aMicrowaves. |
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| 650 | | 0. |
‡aElectronics. |
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| 650 | | 0. |
‡aOptical materials. |
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| 650 | 1 | 4. |
‡aChemistry. |
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| 650 | 2 | 4. |
‡aOptical and Electronic Materials. |
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| 650 | 2 | 4. |
‡aElectronics and Microelectronics, Instrumentation. |
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| 650 | 2 | 4. |
‡aCeramics, Glass, Composites, Natural Methods. |
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| 650 | 2 | 4. |
‡aMicrowaves, RF and Optical Engineering. |
|---|
| 650 | 2 | 4. |
‡aIndustrial Chemistry/Chemical Engineering. |
|---|
| 710 | 2 | . |
‡aSpringerLink (Online service) |
|---|
| 773 | 0 | . |
‡tSpringer eBooks |
|---|
| 776 | 0 | 8. |
‡iPrinted edition:
‡z9783540221098 |
|---|
| 856 | 4 | 0. |
‡uhttp://biblioteca.ipicyt.edu.mx:2048/login?url=http://dx.doi.org/10.1007/b138230
‡yTexto completo
‡9CONS |
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| 950 | | . |
‡aChemistry and Materials Science (Springer-11644) |
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| 901 | | . |
‡a19230
‡b
‡c19230
‡tbiblio
‡sSystem Local |
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