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Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures Cover Image E-book E-book

Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures

Frühauf, Joachim. (author.). SpringerLink (Online service) (Added Author).

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  • ISBN: 9783540268765
  • Physical Description: electronic
    electronic resource
    access
    remote
    XII, 221 p. 165 illus. online resource.
  • Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.

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