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Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines Cover Image E-book E-book

Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines

Lang, Jeffrey. (editor.). SpringerLink (Online service) (Added Author).

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  • ISBN: 9780387777474
  • Physical Description: electronic
    electronic resource
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    XIV, 454p. 604 illus., 302 illus. in color. online resource.
  • Publisher: Boston, MA : Springer US : Imprint: Springer, 2010.

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