Introductory MEMS Fabrication and Applications

Adams, Thomas M. (author.). Layton, Richard A. (author.). SpringerLink (Online service) (Added Author).

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• ISBN: 9780387095110
• Physical Description: electronic
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  XV, 444p. 50 illus., 25 illus. in color. online resource.
• Edition: 1.
• Publisher: Boston, MA : Springer US, 2010.

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