Introduction to Microsystem Design
Record details
- ISBN: 9783642194894
-
Physical Description:
electronic
electronic resource
access
remote
XXII, 321p. 225 illus. digital. - Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
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Subject: | Engineering Systems engineering Optical materials Engineering Nanotechnology and Microengineering Optical and Electronic Materials Applied and Technical Physics Circuits and Systems |