E-book
Multilayer Integrated Film Bulk Acoustic Resonators
Record details
- ISBN: 9783642317767
- Physical Description: X, 152 p. 97 illus. online resource.
- Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg : 2013.
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| Subject: | Engineering. Surfaces (Physics). Engineering. Nanotechnology and Microengineering. Surfaces and Interfaces, Thin Films. Solid State Physics. |
