MEMS Reliability

Hartzell, Allyson L. (Author). da Silva, Mark G. (Added Author). Shea, Herbert R. (Added Author). SpringerLink (Online service) (Added Author).

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• ISBN: 9781441960184
• Physical Description: electronic
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  XIV, 294 p. digital.
• Edition: 1.
• Publisher: Boston, MA : Springer US, 2011.

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