E-book
Nanoimprint Lithography: An Enabling Process for Nanofabrication
Record details
- ISBN: 9783642344282
- Physical Description: XIII, 249 p. 225 illus., 107 illus. in color. online resource.
- Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg : 2013.
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| Subject: | Engineering. Nanochemistry. Optical materials. Nanotechnology. Engineering. Nanotechnology and Microengineering. Optical and Electronic Materials. Nanotechnology. Nanochemistry. |
