Nanoimprint Lithography: An Enabling Process for Nanofabrication

Zhou, Weimin. (author.). SpringerLink (Online service) (Added Author).

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• ISBN: 9783642344282
• Physical Description: electronic
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  XIII, 249 p. 225 illus., 107 illus. in color. online resource.
• Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg : 2013.

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