Nanoimprint Lithography: An Enabling Process for Nanofabrication
Record details
- ISBN: 9783642344282
-
Physical Description:
electronic
electronic resource
access
remote
XIII, 249 p. 225 illus., 107 illus. in color. online resource. - Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2013.
Search for related items by subject
Subject: | Engineering Nanochemistry Optical materials Nanotechnology Engineering Nanotechnology and Microengineering Optical and Electronic Materials Nanotechnology Nanochemistry |